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Complete Adaptive Optics Systems Using MEMS Deformable Mirror Devices
 

In parallel with developments in MEMS technology, researchers have been developing micro-optical devices, such as refractive micro lenses. Micro-optical functions and devices, such as focal plane optical concentration and optical fill factor enhancements, Hartmann wavefront sensors, color separation, beam shaping, and miniature optical scanning have demonstrated the potential of this technology.

Merging micro-optics, microelectronics and micro-electro-machines creates a new and broader class of micro-opto-electro-mechanical (MOEM) devices. This scientific breakthrough has created a revolution in technology. For the first time all the components necessary for adaptive optics- sensors, electronics and actuators are available in low cost micro-versions. There no longer remains any cost or technological reason why adaptive optics can not be made available to the mass market. This technology is potentially low cost and accessible to commercial and astronomical users. Achieving this goal is the objective of MEMS Optical, Inc.

Figure 4 shows a prototype device which demonstrates the combination of MEMS deformable mirrors, with Complementary Metal Oxide Semiconductor, (CMOS) electronics and micro optics for wavefront detection. This MEMS deformable mirror device is based on the electrostatic parallel plate capacitor actuators. This device was designed MEMS Optical, Inc., and fabricated by Metal Oxide Semiconductor Information Sciences, MOSIS, foundry. A central mirror plate is suspended by aluminum springs over a pit etched into the silicon substrate. A voltage applied between the suspended plate and the bottom of the pit creates an attractive force. The electrostatic force pulls the mirror plate down; the springs provide the restoring force. A microlens array (not shown) is used to focus the incident light onto the mirror element. The light is reflected by the micromirror and recollimated back through the microlens. The use of the microlens array maintains 100% mirror fill factor, and at the same time frees up additional space on the substrate for drive electronics and other electronics. This is demonstrated in the figure below which shows a photodiode detector and mirror drive electronics fabricated on the same substrate.

Figure 4 - Segmented Piston Deformable Micromirror Device.

Silicon Adaptive Optics System

MEMS deformable mirrors integrated with micro optics and electronics will result in an integrated adaptive optics system in the near future. The functions of wavefront sensing and correction will be preformed on a single chip. These devices will offer substantial performance gains and at the same time reduce system cost by orders of magnitude. A completely solid state implementation will also greatly simplify the integration and use of adaptive optical systems. This device operates as a simple mirror in the application. The aberrations of the incident wavefront are sensed and a correction is applied. A corrected wavefront is reflected from the mirror. These simplification will result in new markets which will include biomedical imaging, industrial laser beam shaping, laser communications and advanced imaging systems for extended object imaging.

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