	$MEMS Optical, leading supplier and manufacturer of refractive/diffractive micro optics and MEMS devices and more$	$MEMS Optical, leading supplier and manufacturer of refractive/diffractive micro optics and MEMS devices and more$	$MEMS Optical, leading supplier and manufacturer of refractive/diffractive micro optics and MEMS devices and more$	$MEMS Optical, leading supplier and manufacturer of refractive/diffractive micro optics and MEMS devices and more$

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What is Gray Scale Technology?

How to Benefit From and Use Micro-Opto- Electro- Mechanical Systems - MOEMS

Diffractive Optics

Micro-Mechanical Adaptive Optic Systems

How and Why Diffractive Optics are Used

Light Patterns

Deformable Mirror Spatial Light Modulator

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MEMS Deformable Mirror Spatial Light Modulator

Potential Applications
Helpful Specifications for Pricing and Inquiries

The MEMS Deformable Mirror Spatial Light Modulator is a low-cost, single-chip, 325 element device that can be used in an adaptive-optics loop to perform wavefront correction. Each segment is 500µm by 500µm in size, resulting in a device aperture of 1.05cm. The phase range is 3µm and the mechanical 3dB bandwidth is approximately 3KHz. With the attached micro-lenslet array, a fill factor of greater than 80% is achieved. This device is useful for optical wavelengths from IR to UV. Each segment can be positioned over its entire phase range by applying an electrostatic voltage from 0V to 20V.

The mirror chip can be purchased alone, or with a driver board. The driver board interfaces to the user's PC through a standard RS-232 serial (COM) port and provides activation voltages for each of the mirror elements. With the provided graphical users' interface (GUI), each pixel can be independently positioned over its 3µm phase range at an 8-bit resolution. The GUI allows for transparent correction of fixed phase errors in the mirror chip with a programmable offset table. The driver board also has a standard parallel port connection for rapid control through the user's PC LPT port, and a high-speed RS-422 parallel port for full-bandwidth control of the mirror chip with wavefront sensors. Consult our web site for compatible wavefront sensors that are currently in development.

Potential Applications
Astronomy	Correction of Fixed Aberrations in Optical Systems
Medical Imaging	Optical Modulation
Laser Communication	Programmable Reflective Lens
Laser Beam Forming and Beam Steering	Correction of Aberrations in Optical Systems Due to Temperature Variations

Helpful specifications for pricing and inquiries:

Number of Mirror Elements; Mirror Element Pitch; Phase Range; Control Voltage Range; Fill Factor; Mechanical Bandwidth; Type of Package; Optical Wavelength Usage

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